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Vacuum Science and Technology
0253-9748
2009 Issue 2
Growth and Characterization of Boron-Doped na-Si:H Films Used as Window Layer Material of Solar Cells
li zhe; zhang xiwen*; han gaorong (department of materials science and engineering; silicon state key lab.; zhejiang university; hangzhou 310027; china)
..............page:119-124
Simulation of Atomic Layer Deposition of Al_2O_3 on H-Si(100) Surface
shen can1; huang guangzhou1*; ma guoxin1; ye weibin1; zhu jianming; dai jinfu2 (1.college of electronic and information engineering; south china university of technology; guangzhou; 510640; china; 2.keyun vacuum equipments co.ltd.zhaoqing 526060; china)
..............page:125-129
Ion Beam Bombardment and Variations in Stress of TiO_2 Films
chen tao*; luo chongtai; wang duoshu; liu hongkai (national key lab.of surface engineering; lanzhou institute of physics; lanzhou 730000; china)
..............page:164-167
Characteristics of Ka Band Slow-Wave Structure with Metal Photonic Band-Gap
gao xi; yang ziqiang*; qi limei; lan feng; shi zongjun; liang zheng (institute of high energy electronics; university of electronic science and technology of china; chengdu 610054; china)
..............page:139-143
Analysis of Nonlinear Distortion in Helix Traveling Wave Tubes
tang kangsong1; 2*; zhao gang1; 2; li shi1; yin hejun1 (1.institute of electronics; chinese academy of sciences; beijing 100190; china; 2.graduate university of chinese academy of sciences; beijing 100039; china)
..............page:204-208
Similarities and Differences Between Negative Electron Affinity GaN and GaAs Photocathode Activation Mechanisms
qiao jianliang1; 2*; chang benkang1; niu jun1; 2; yang zhi1; zou jijun1 (1.institute of electronic engineering and optoelectronic technology; nanjing university of science & technology; nanjing 210094; china; 2.department of electronic & electric engineering; nanyang institute of technology; nanyang 473004; china)
..............page:115-118
Growth and Characterization of TiO_2/TiN Camouflage Films with Low Infrared Emission on Polymide Substrates
cao ye; diao xungang*; meng chao; chen jiangle; gu baoxia (beihang university; beijing 100083; china)
..............page:213-217
Thermoelectric Properties of p-Type Transparent Conducting CuAlO_2 Films
fang liang1; 2*; hang qiuliu1; peng liping1; wu fang1 (1.department of applied physics; chongqing university; chongqing 400044; china; 2.the key laboratory of optoelectronic technology and systems of the education ministry of china; chongqing university; chongqing 400044; china)
..............page:144-149
Thermopile-Structured Micro Thermal Conductivity Vacuum Sensor
ma bin*; liang pingzhi; chen shijun; cheng zhengxi (shanghai institute of technical physics; chinese academy of sciences; shanghai; 20083; china)
..............page:218-223
Modeling and Decoupling Control of Vacuum Brazing Temperature
li xiaobin1* wu yanxiang1 sun haiyan1 kou demin2 (1.college of engineering science and technology; shanghai ocean university; shanghai 200090; china; 2.college of electrical and information engineering; lanzhou university of technology; lanzhou 730050; china)
..............page:150-154
Out-Gassing Characteristics of Graphite Used in Experimental Advanced Superconducting Tokamak
chen changqi1; dou renchao1*; hu jianshen2; gong xianzu2; wang xiaoming2; wang houyin2 (1.hefei university of technology; hefei 230009; china; 2.institute of plasma physics; chinese academy of sciences; hefei 230031; china)
..............page:198-203
Microstructures and Optical Properties of Sn_2S_3 Films
lu jianli; li jian*; bai haiping; yang jing (school of physical science and technology; inner mongol university; hohhot 010021; china)
..............page:130-134
Photocatalytic Degradation of Amorphous TiO_2-V films Grown by Magnetron Sputtering
huang jiamu; cai xiaoping*; zhao pei; li yuexia (college of materials science and engineering chongqing university; chongqing 400045; china)
..............page:209-212
Modeling and Parameterization of Transmittance Spectra of Indium Tin Oxide Films
guo shouyue1 cao chunbin1 sun zhaoqi2* (1.school of sciences; anhui agricultural university; hefei 230036; china; 2.school of physics and material science; anhui university; hefei 230039; china)
..............page:180-183
Measurement of TiN Film Substrate Interfacial Adhesion by Scratching
qu quanyan1; 2; qiu wanqi1; zeng dechang1*; liu zhengyi1 (1.depatment of metal materials science and engineering; school of materials science and engineering; south china university of technology; guangzhou 510640; china; 2.guangdong institute of special equipment inspection; guangzhou; 510655; china)
..............page:184-187
X-Ray Photoelectron Spectroscopy Study of Activation of TiZrV Nonevaporable Getters
chu yongjun; xiong yuhua*; du jun; wei xiuying; qin guangrong (institute of the advanced electronic materials; beijing general research institute for non-ferrous metals; beijing 100088; china)
..............page:160-163
Growth and Characterization of Rare Earth Metal Doped GaN Films by Electron Cyclotron Resonance Plasma Assisted Pulsed Laser Deposition
gao kun1; lu yifei1; shi liqun2; sun jian1; xu ning1; wu jiada1* (1.state key lab for advanced photonic materials and devices; department of optical science & engineering; fudan university; shanghai 200433; china; 2.institute of modern physics; fudan university; shanghai 200433; china)
..............page:155-159
Microstructures and Mechanical Properties of Vanadium Carbide Films Grown by Reactive Magnetron Sputtering
li guangze; wu xiaoyan; chen yanghui; li geyang* (state key lab of metal matrix composites; shanghai jiao tong university; shanghai; 200240; china)
..............page:168-172
Atomic Layer Deposition and Its Applications in Optical Thin Films
he junpeng; zhang yueguang*; shen weidong; liu xu; gu peifu (state key laboratory of modern optical instrumentation; zhejiang university; hangzhou 310027; china)
..............page:173-179
Surface Modification of Cutting Tools With Ti-Si-N Coatings
huang linjun1; zhao haibo2*; shen baoluo1; liang hongying3; wang hui2 (1.college of materials science and engineering; sichuan university; chengdu 610064; china; 2.analysis center; sichuan university; chengdu 610064; china; 3.engineering library; sichuan university; chengdu 610064; china)
..............page:194-197
Auger Electron Spectroscopy Study of Uranium Films on Copper Substrate
jiang chunli*; xian xiaobin; xiao hong; lu lei (national key laboratory for surface physics and chemistry; mianyang 621907; china)
..............page:135-138
Influence of the Deposition Parameters on the Microstructure and Mechanical Properties of B-doped nc-Si∶H Films
ding jianning1; 2; qi hongshan1*; yuan ningyi2; he yuliang1; cheng guanggui1; fan zhen1; pan haibin1; wang junxiong1; wang xiuqin2 (1.center of micro and nano science and technology; jiangsu university; zhenjiang 212013; china; 2.jiangsu polytechnic university; changzhou 213016; china)
..............page:188-193