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Vacuum Science and Technology
0253-9748
2008 Issue 5
Hardening Mechanism of TiN Coating by Magnetic Filtered Arc Ion Plating
shi xinwei1; 3*; li xingrui2; qiu wanqi3; liu zhengyi3(1.physical science & technology college; zhengzhou university; key laboratory of material physics; the ministry of education of china(zhengzhou university); zhengzhou 450052; china; 2.college of material science and engineering; zhengzhou university; zhengzhou 450052; china; 3.college of mechanical engineering; south chian university of technology; guangzhou 510641; china)
..............page:486-491
Growth and Characterization of Polycrystalline HgI_2 Films on Amorphous-Si Film Substrate
zheng yaoming; shi weimin*; wei guangpu; qin juan; xu huan(school of materials seience and engineering; shanghai university; shanghai 200072; china)
..............page:441-444
Deposition of Fe Ion-Implanted Diamond-Like Carbon Multilayers
ma zhanji; zhao dongcai*; xiao gengjie; ren ni; wu shenghu(national key lab of surface engineering; lanzhou institute of physics; lanzhou 730000; china)
..............page:410-414
Interfacial Microstructures of Chromium Oxide Coatings
pang xiaolu; gao kewei*; yang huisheng; wang yanbin(department of materials physics and chemistry; beijing university of science and technology; beijing 100083; china)
..............page:420-423
Modeling of Deep Reactive Ion Etching by Inductively Coupled Plasma with String Algorithm
zhang jian*; he xiaoxiong; liu chengyue; qi haochen(department of applied physics; hefei university of technology; hefei 230009; china)
..............page:481-485
Selective Absorption of TiOxNy Bi-Layers Grown by DC Reactive Magnetron Sputtering
wang hequan1; 2; wang zhijian1; ba dechun2; shen hui3*; chen da3; wen lishi4(1.shenyan institute of aeronautical engineering; shenyang 110034; china; 2.northeastern university; shenyang 110004; china; 3.sunyat-sen university; guangzhou 510275; china; 4.institute of metal research; chinese academy of sciences; shenyang 110016; china)
..............page:450-453
Design and Construction of Metal Organic Chemical Vapor Deposition System with Plasma Enhanced Liquid Source
liu weiguo*; zhou shun; gao aihua; zhang wei; zhang xiongxing; jin na(micro-optoelectronic system labs; xi an technological university; xi an 710032; china)
..............page:476-480
Latest Progress in Growth of Silicon Nanowire and Growth Mechanisms
peng yingcai1; 2; zhao xinwei3; 4; fan zhidong1; bai zhenhua1(1.college of electronic and informational engineering; hebei university; baoding 071002; china; 2.key laboratory of semiconductor material science; institute of semiconductors; chinese academy of science; beijing 100083; china; 3.department of physics; tokyo university of science; tokyo 162-8601; japan; 4.laboratory of nano-materials and nano-devices; institute of microelectronics; chinese academy of science; beijing 100029; china)
..............page:429-436
Development of Predistorter for Compensating Nonlinearity of Traveling Wave Tube Amplifiers
song jiaqian*; zhou dongfang; zhang xiang(institute of information engineering; information engineering university; zhengzhou 450002; china)
..............page:471-475
Photoelectric Properties of Metal-Phthalocyanines/ZnO Composite Films
song shuguang; shen honglie*; sun binbin; huang haibin; lu linfeng(college of materials science and technology; nanjing university of aeronautics and astronautics; nanjing 210016; china)
..............page:458-461
Synthesis and Characterization of Carbon-Encapsulated Fe Nanoparticles by DC Carbon Arc Plasma
wei zhiqiang1; 2*; zhu lin1; qiao hongxia2; yang hua1; xia tiandong2; yan pengxun3(1.school of science; lanzhou univ.of tech.; lanzhou; 730050; china; 2.state key lab.of advanced new non-ferrous materials; lanzhou univ.of tech.; lanzhou 730050; china; 3.school of physical science and technology; lanzhou university; lanzhou; 730000; china)
..............page:454-457
CrN_x Coatings by Multi-Arc Ion Plating on 2024 Al Alloy Substrates
zhang liping1; li jianfeng2; li guoqing1*; wang zhaosong1; li xiaona1; dong chuang1(1.state key laboratory for materials modification by laser; ion and electron beams; dalian universityof technology; dalian 116024; china; 2.dalian jiaotong university; dalian 116028; china)
..............page:445-449
Microstructures and Properties of Diamond-Like Carbon/TiAlN Composite Films by MF Magnetron Sputtering
zhang yichen1*; ba dechun1; yu dayang1; ma shengge2(1.school of mechanical engineering & automation; northeastern university; shenyang 110004; china; 2.national r&d center for surface engineering of china; shenzhen 518029; china)
..............page:424-428
Anode Striation in Shadow Mask Plasma Display Panels
yang zhilong; tu yan*; yang lanlan; liu delong; ling ling; he wanwan(school of electronic science and engineering; southeast university; nanjing; 210018)
..............page:399-403
Fabrication of Thin Film Device with Copper Phthalocyanine Active Layer and Its Electrical Bistability
li xunshuan; peng yingquan*; song chang an; yang qingsen; zhao ming; yuan jianting; wang hong(school of physical science and technology; lanzhou university; lanzhou; 730000; china)
..............page:394-398
Design and Fabrication of Pole-Controlled Electron Gun
zhao gang1; 2*; tang kangsong1; 2; li shi1; yin hejun1(1.institute of electronics; chinese academy of science; p.o.box 2652; beijing 100080; china; 2.graduate school of chinese academy of sciences; beijing 100039; china)
..............page:467-470
Film Thickness Monitoring with Quartz Wafer
zhao shuangqi*; liu guili; li dong; liu gang(department of electronics and information engineering; beijing institute of machinery; beijing 100085; china)
..............page:437-440
Fabrication of Light Trapping Aluminum-Induced Texture on Floating Glass Substrate
zheng wen; chen yongsheng; lu jingxiao*; guo xuejun; zhang qingfeng; gao zhe(the key laboratory of material physics of the ministry of education of china; zhengzhou university; zhengzhou 450052; china)
..............page:389-393
Deposition of Amine-Containing Functional Films by RF Plasma Polymerization and Its Bioproperties
xie fenyan1; wu tong2; fu yabo1; weng jing2; chen qiang1*(1.laboratory of plasma physics and materials; beijing institute of graphic communication; beijing 102600; china; 2.school of basic medical sciences; capital medical university; beijing 100069; china)
..............page:462-466
Ion Dynamics in Pulsed Plasma Sheath of Plasma Source Ion Implantation of a Hemispherical Bowl-Shaped Vessel Object with a Concentric Auxiliary Electrode
liu chengsen1*; li xiaohong1; wang dezhen2; liu tianwei3(1.department of physics; liaoning normal university; dalian 116029; china; 2.state key laboratory for materials modification by laser; ion and electron beams; department of physics; dalian university of technology; dalian 116023; china; 3.state key laboratory of surface physics and chemistry; caep; mianyang 621900; china)
..............page:415-419
Surface Modification of Polypropylene Films Deposited by Dielectric Barrier Discharge in Air
fang zhi*; zhang cheng; hu jianhang; zhao longzhang(school of automation; nanjing university of technology; nanjing 210009; china)
..............page:404-409