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Vacuum Science and Technology
0253-9748
2008 Issue 3
Low Substrate Temperature and Electrochromic Property of Sputtered NiO_x Films
zhang jinwei1; diao xungang1*; wang huaiyi1; wang tianmin1; wu zhe2; shu yuanjie3 (1.school of science; beihang university; beijing 100083; china; 2.school of aeronautic science and technology; beihang university; beijing 100083; china; 3.institute of chemical materials; caep; mianyang 621900; china)
..............page:189-193
Growth and Properties of P-Type Zn-Doped CuAlS_2 Films
wang yinhua; zhang qun*; li guifeng; shi zhan; tan hua (department of materials science; fudan university; shanghai 200433; china)
..............page:199-202
Influence of Carrier Gas on Microstructures and Morphologies of Cu(In_(1-x)Ga_x)Se_2 Films
han donglin; zhang gong*; zhuang daming; yuan jinshi; li chunlei (department of mechanical engineering; tsinghua university; beijing 100084; china)
..............page:235-239
Operating Characteristics of Newly Modified Broad Beam Ion Source
xu junqi*; hang lingxia; mi qian; yan yixin and dong wangni (shanxi province thin film technology and optical test open key laboratory; xi an technological university; xi an 710032; china)
..............page:266-270
Microstructures and Electronic Properties of Nitrogen Doped Diamond-Like C∶N Films
li heqin*; he xiaoxiong; wang shuzhan; wu shaobo; zhao zhiming (school of materials science and engineering; hefei university of technology; hefei 230009; china)
..............page:225-229
Study of Surface Oxidation of PbTe Films
si jianxiao; wang qinglei; wu haifei; zhang hanjie; wu huizhen*; xu tianning; xia minglong (department of physics; zhejiang university; hangzhou 310027; china)
..............page:208-212
Deposition and Properties of ZnO/Ag/ZnO Multi-Layers on Polyethylene Terephthalate Fiber Substrate
deng bingyao*; liu jiangfeng; gao weidong (the key laboratory of science & technology of eco-textile; ministry of education; jiangnan university; wuxi 214122; china)
..............page:244-247
Microstructures of Poly(2-Methoxy-5-Octyloxy)-1,4-Phenylene Vinylene Films Modified by Nitrogen Ion Implantation
sun jianping1*; wu hongcai2 (1.college of chemistry and materials science; fujian normal university; fuzhou 350007; china; 2.institute of photoelectric technology and solar energy; xi an jiaotong university; xi an 710049; china)
..............page:248-251
Simulation of Coating by Magnetron Sputtering of Rectangular Planar Targets
qiu qingquan1; li qingfu1*; su jingjing1; jiao yu2; finely jim2 (1.school of electrical engeneering; xi an jiaotong university; xi an 710049; china; 2.ppg glass r&d center; pittsburgh; pennsylvania; 15238; usa)
..............page:218-224
Design and Simulation of 8mm Coaxial Extended Interaction Oscillators
ye jiruo1*; yan yang1; wu jianqiang1; 2; yin xiaohui1 (1.college of physical electronics; uestc; chengdu 610054; china; 2.zhongshan institute; uestc; zhongshan 528402; china)
..............page:213-217
Experimental Techniques in Simulated Space Plasma Environment on Ground
tong jingyu*; sun lichen; jia ruijin; liu yenan (beijing institute of spacecraft environment engineering; beijing 100094; china)
..............page:203-207
Calculation of 2-D Magnetic Field Distribution of Planar Magnetron Targets
zhao huayu; mu zongxin*; jia li; zhang pengyun; hao shengzhi (state key laboratory of materials modification by laser; ion and electron beams; school of physics and optoelectronic technology; dalian university of technology; dalian; 116024; china)
..............page:271-274
Growth and Negative Thermal Expansion of Magnetron Sputtered Al_2(WO_4)_3 Films
cheng xiaonong*; liu hongfei; zhang zhiping; qu zhan (school of materials science and engineering; jiang su university; zhenjiang 212013; china)
..............page:252-255
Growth and Photoelectrical Properties of Indium Tin Oxide Films on Flexible Substrates
hao lei; diao xungang*; hu xiaocao; zhang luyu; hao weichang; wang tianmin (school of science; beihang university; beijing 100083; china)
..............page:256-260
Packaging Technology of Micro-Electro-Mechanical System by Vacuum Welding
guan rongfeng* (department of electronics and information engineering; suzhou university of science and technology; suzhou 215011; china)
..............page:275-279
Solid Phase Crystallization of Silicon Films Deposited on Different Substrates
chen qingdong; zhang yuxiang*; guo min; li hongju; gao zhe; wang junping (ministry of education key laboratory of material physics zhengzhou university; zhengzhou 450052; china)
..............page:230-234
Influence of Manganese Doping on Microstructures and Optical Properties of SiC Films
song shuguang; shen honglie*; wang meiling; gao chao; yuan chengyi (college of materials science and technology; nanjing university of aeronautics and astronautics; nanjing 210016; china)
..............page:240-243
Yttrium Impurity and Hardness of CrAlTi(Y)N Films
liu zhaozheng1; liu yaohui1*; jiang bailing2 (1.college of materials science and engineering; jilin university; changchun 130025; china; 2.college of materials science and engineering; xi an university of technology; xi an 710048; china)
..............page:194-198
Wear Resistance and Biocompatibility of Diamond-Like Carbon Coating on Titanium Biomaterials
yin lu1; guo tianwen1*; zhao wen1; mi qian2 (1.stomatology of the forth millitary medical university; xi an 710032; china; 2.shanxi province thin film technology and optical test open key laboratory; xi an technological university; xi an 710032; china)
..............page:261-265