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Vacuum Science and Technology
0253-9748
2007 Issue 1
Heteroepitaxial Growth of 3C-SiC on Si(111) by Solid Source Molecular Beam Epitaxy
liu jinfeng~1; liu zhongliang~1; wang kefan~1; xu pengshou~(1*); tang honggao~21.national synchrotron radiation laboratory; university of science and technology of china; hefei 230029; china; 2.department of material science & engineering; university of science and technology of china; hefei 230026; china
..............page:5-9
Influence of Different Substrates on Microstructures of Lanthanum-Doped Lead Titanate Ferroelectric Thin Films
liu hong; pu zhaohui; gong xiaogang; zhang zhenning; xiao dingquan and zhu jianguo*(department of materials science; sichuan university; chengdu 610064; china)
..............page:42-45
Plasma Cyro-etching of High Aspect Ratio Silicon Crystal Structures
lu dejiang~(1; 2) and jiang zhuangde~(1; 2*)(1.institute of precision engineering; xi an jiaotong university; xi an 710049; china; 2.state key laboratory for manufacturing system engineering; xi an 710049; china)
..............page:25-30
Newly-Developed Miniaturized Compound Sputtering Ion Pump
hu yinfu~*; qi jing and chen xu(dept.of electronic engineering; tsinghua university; beijing 100084; china)
..............page:20-24
Dynamic Vibration Simulation of Rotary Piston Vacuum Pump
cao wengang; zhao haojie; ii zhiyuan and chen changqi (school of mechanical and automobile engineering; hefei university of technology; hefei; 230009; china)
..............page:67-71
Particle Simulation of Helical Traveling-Wave Tube
zhu zhaojun~*; jia baofu; luo zhengxiang and yang chiru(school of optoelectronic information; university of electronic science and technology of china; chengdu 610054; china)
..............page:10-15
Different Vacuum Sealing and Microwave Transport
jiang daoman~*; jin kai and wei wei(national synchrotron radiation laboratory; ustc; hefei; 230029; china)
..............page:50-53
Dry Etching of Molybdenum Film in Fabrication of Thin Film Transistor Liquid Crystal Display
xun benpeng~(1*); qiu haijun~2; jiang bin~1; wang zhangtao~21.university of electronic science and technology of china; chengdu; 610054; china; 2.beijing orient electronics optoelectronics technology co.ltd; beijing; 100176; china
..............page:54-57
Gas Injection System for the Shanghai EBIT Facility
an shuangli~(1; 2*); jiang dikui~1; guo panlin~1; zhang haiou~1(1.shanghai institute of applied physics; cas; shanghai 201800; china; 2.graduate school of cas; beijing 100049; china)
..............page:1-4
Simulation and Optimization of Helix Slow-Wave Structure for X-Band 40 W High Efficiency Traveling-Wave Tubes
fan huiming~(1; 2); su xiaobao~(1*)1.institute of electronic; the chinese academy of sciences; beijing; 100080; china; 2.graduate university of chinese academy of sciences; beijing; 100039; china
..............page:16-19
Preparation of Silver Nanopowder by Vacuum Freeze-Drying
liu jun~(1*); xu chenghai~2 and zhang shiwei~21.normal school of shenyang university; shenyang 110015 china; 2.school of mechanical engineering and automation; northeastern university; shenyang 110004 china
..............page:37-41
Evaluation of Charged Environments in Environment Scanning Electron Microscope
fu jingyong; ji yuan~*; zhang yinqi; wang li; tian yanbao; xu xuedong; han xiaodong(institute of microstructure and property of advanced materials; beijing university of technology; beijing 100022; china)
..............page:72-75
Growth and Properties of CuInS_2 Films by Solid-State Sulfurization
zha shan~*; yuan jinshi; zhang gong and zhuang daming(department of mechanical engineering; tsinghua university; beijing 100084; china)
..............page:63-66
Improving on the Rolling Contact Fatigue Life and Mechanical Behaviors of Bearing Steel by Nitrogen Plasma Immersion Ion Implantation
liu hongxi~(1*); li xiaobang~2; li qijun~3(1.state key laboratory of advanced welding production technology; harbin institute of technology; harbin; 150001; china; 2.chengde petroleum college; chengde; 067000; china; 3.beijing branch company of china petroleum sale company; beijing; 100083; china)
..............page:31-36
Variable-Frequency Power Supply of Vacuum Freeze-Drying Equipment
xu yansheng~(1; 2*); yang zeliang~2; long jianyou~1; wang rulin~31.shunde polytechnic college; foshan guangdong 528300; china; 2.the school of electric power engineering; south china university of technology; guangzhou; 510640; china; 3.guangzhou ruixin electric equipment co.ltd.; guangzhou 510000; china
..............page:84-87
Growth Orientation of Poly-Si Film by Hot-Wire Chemical Vapor Deposition
chai zhan; zhang guifeng~*; wang sai and hou xiaoduostate key laboratory of materials modification by laser; ion and electron beams; school of materials science and engineering; dalian university of technology; dalian; 116024; china
..............page:76-79
Tooth Interference of Single-Threaded Trapezoidal Rotor Profile and Fixed Pitch Screw in Dry Twin Screw Vacuum Pump
zhang shiwei; xu chenghai; zu wenwen; zhao yu(school of mechanic engineering & automation; northeastern university; shenyang 110004; china)
..............page:46-49
Pulased Mode of Inverted-Magnetron Cold-cathode Gauge
mao huiyong~*; wang yi(school of electrical engineering; beijing jiaotong university; beijing 100044; china)
..............page:58-62
Mass Spectroscopy Study of Residual Gases in Vacuum Electronic Devices and Its Storage Lifetime
cui yunkang~(1; 2); zhang xiaobing~(1*); lei wei~1; xiao mei~1; di yunsong~1; wang jinchan~1; mao fuming~11.school of electronic science and engineering; southeast university; nanjing 210096; china; 2.dept.of basic courses; nanjing institute of technology; nanjing 210013; china
..............page:80-83