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Vacuum Science and Technology
0253-9748
2006 Issue 4
Electroluminescence of a-SiC_x p-i Junction
yue ruifeng; yao yongzhao and liu litian(institute of microelectronics; tsinghua university; beijing; 100084; china)
..............page:259-262
Vacuum System of Storage Ring in Beijing Electron Positron Collision Project II
dong haiyi~*; song hong; li qi; zhou lijuan; yang qi; wang yating and xiao qiong(institute of high energy physics; chinese academy of sciences; beijing; 100049; china)
..............page:335-338
Study on B-doped a-Si Film Deposited by Plasma Enhanced Chemical Vapor Deposition as Thermal Sensitive Material for Uncooled Infrared Detector
yue ruifeng~*; dong liang and liu litian(institute of microelectronics; tsinghua university; beijing; 100084; china)
..............page:277-281
Synthesis of Nanostructured SiC Films by Plasma Enhanced Chemical Vapor Deposition with Hydrogen Diluted Hexalmethyldisiloxane as Precursor
yan guanchao; ding siye; zhu xiaodong~*; zhou haiyang; wen xiaohui and ding fangcas key laboratory of basic plasma physics; department of modern physics; university of science and technology of china; hefei; 230026; china
..............page:326-329
Influence of Laser Conditioning on Laser Induced Damage Threshold of Antireflection Layer
cui yun~*; zhao yuanan; jin yunxia; zhang weili; qi hongji; fan zhengxiu and shao jianda(shanghai institute of optics and fine mechanics; shanghai; 201800; china)
..............page:321-325
Wear Resist Films Grown by Ion Beam Assisted Deposition in Gravure Printing
zhang yuefei~*; wang zhengduo; fu yabo; chen qiang; zhang guangqiu; ge yuanjing(plasma physics & materials laboratory; beijing institute of graphic communication; beijing; 102600; china)
..............page:317-320
Influence of AlN Buffer Layer on GaN Film Growth on Si(111) Substrates
wang jingrui; ye zhizhen~*; zhao binghui; zhu liping and tang haiping(state key lab of silicon materials; zhejiang university; hangzhou; 310027; china)
..............page:308-312
Monte Carlo Simulation of Positional Beaming Effect of Molecular Flow in Straight Cylindrical Pipeline
zhang shiwei~*; han jin; liu kun and wang jichang (mechanical engineering & automation college; northeastern university; shenyang; 110004; china)
..............page:295-298
Corrosion Resistance of TiN and(Ti,Cr)N Composite Films Grown by Arc Ion Plating
shi xinwei~(*1; 3); li xingrui~2; qiu wanqi~3; liu zhengyi~31.physical science & technology college; zhengzhou university; key laboratory of material physics; the ministry of education of china(zhengzhou university); zhengzhou; 450052; china; 2.college of material science and engineering; zhengzhou university; zhengzhou; 450052; china; 3.college of mechanical engineering; south chian university of technology; guangzhou; 510641; china
..............page:330-334
Growth of Black Hard Films of Ti/TiN/Ti(N,C)/TiC by Cylindrical Arc Ion Plating
ma shengge~(1*) and jiang cuining~21.national r&d center for surface engineering of china; shenzhen; 518029; china; 2.shenzhen new nanya technology development co.; ltd.; shenzhen; 518029; china
..............page:290-294
Improved Design of Uniformity Mask for Flat Planetary Fixture
fang ming~*; zheng weijun; wu ming; fan ruiying; yi kui and fan zhengxiuresearch and development center for optical coating films; shanghai institute of optics and fine mechanics; chinese science academy; shanghai; 201800; china
..............page:286-289
Gas Supply System for Growth of High Quality InGaN/GaN Multi-Quantum-Wells by Metal Organic Chemical Vapor Deposition
li peixian~* and hao yue(microelectronic institute; xidian university; xi an; 710071; china)
..............page:313-316
2D Particle-in-cell Simulation of Plasma Immersion Ion Implantation and Dose Distribution
wu zhiwei; ding ke; gu changxin~*; sun qi and shan liying(department of materials science; fudan university; shanghai; 200433; china)
..............page:303-307
Theoretical Study of Ultra-Large-Angle Deflection in Cathode Ray Tube Display
sun yuan; li chi; su xing; lei wei~*; zhang xiaobing and wang baoping(department of electronic engineering; southeast university; nanjing; 210096; china)
..............page:272-276
Variations in Microstructures of Copper Film Oxidation at 100 ℃~400 ℃
zhang li~1; yan xuejian~(1*); zhu guodong~1; zeng zhigang~1; shen miao~1; a.pohlers~21.department of materials science; fudan university; shanghai; 200433; china; 2.faculty of science; chemnitz university of technology; chemnitz; d-09107; germany
..............page:268-271
Simulation of Combined Environment of Atomic Oxygen and Ultraviolet and Development of Protection Technologies
tong jingyu~*; liu xiangpeng; sun gang; jiang lixiang; li jinhong; duo shuwang and li meishuan1.beijing institute of spacecraft environment engineering p.o.box 9832-64; beijing; 100029; china; 2.institute of metal; chinese academy of science; shenyang; 110016; china
..............page:263-267
Off-Lattice Kinetic Monte Carlo Simulation of Initial Stage of TiN Film Growth
wu guangxin~1; liu xuejie~(1; 2*); engelbert westkaemper~2 and wang xinmeng~11.college of mechanics; inner mongolia university of science and technology; baotou; 014010; china; 2.iff; university of stuttgart; stuttgart; 70569; germany
..............page:299-302
Fractal Characterization of Surface Microstructures and Mechanical Properties of GeSb_2Te_4
fu yongzhong~*; ding jianning; yang jichang and xie guoxin(micro/nano science & technology center; jiangsu university; zhenjiang; 212013; china)
..............page:282-285