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Vacuum Science and Technology
0253-9748
2005 Issue 3
(Ti,Al)N Films Deposited by Double-Target Reactive Magnetron Co-Sputtering
yan liangchen; xiong xiaotao; yang huisheng~*; gao kewei and wang yanbin(department of materials physics and chemistry univ.of science and technology; beijing; 100083; china)
..............page:233-237
Performance of Constant Pressure Gas Micro-flowmeter
feng yan~*; cheng yongjun; zhao dingzhong; zhang dixin and li detian(lanzhou institute of physics; lanzhou; 730000; china)
..............page:217-221
Review of Film Growth by Sputtering Technology
yang wenmao~(1; 2); liu yanwen~1; xu luxiang~1; leng yongxiang~1 and huang nan~(*1)(1.the school of materials science & engineering; southwest jiaotong university; chengdu; 610031; china; 2.institute of machinery manufacturing technology; caep; mianyang; 621900; china)
..............page:204-210
Lattice Strains in BaTiO_3/SrTiO_3 Superlattice Prepared with Laser Molecular Epitaxy
jiang bin~*; jiang shuwen; li yan; zhang ying and li yanrong(school of microelectronics and solid-state electronics; university of electronic science and technology of china; chengdu; 610054; china)
..............page:196-199
Large Area Films Growth by RF-Plasma Enhanced Chemical Vapor Deposition
hang lingxia~(*1; 2) and y.yin~11.school of physics; the university of sydney; nsw 2006; australia; 2.shanxi province thin film technology and optical test open key laboratory; xi an institute of technology; xi an; 710032; china
..............page:172-176,180
Microstructures and Coupling of Nano FePt/Fe Multilayers
zhang dayong; gu yousong; zhan xiaoyuan; ji zhen and zhang yue~*(department of material physics and chemistry; beijing university of science and technology; beijing; 100083; china)
..............page:181-184,188
Highly c-Axis Oriented LiNbO_3 Thin Film Directly Grown on Si(111) Substrate by Pulsed Laser Deposition
cao liangliang; ye zhizhen~*; wang xinchang and zhao binghui(state key laboratory of silicon materials; zhejiang university; hangzhou; 310027; china )
..............page:211-213,221
Newly Developed Electrostatic Bonding Tool of Silicon Chip/Glass Ring
wang quan~(*1); ding jianning~1; wang wenxiang~2 and yang ping~11.center of micro/nano science and technology; jiangsu university; zhenjiang; 212013; china; 2.kunshan shuangqiao sensor measurement controlling co.ltd; suzhou; 215325; china)
..............page:214-216,221
Observation of Thermo-sensitive Hydrogels by Environmental Scanning Electron Microscopy
quan xueling~1; ji yuan~(1*); zhang hong~1; zhang yinqi~1; he jiangchuan~2 and lin qiang~2(1.institute for solid microstructure and property; beijing university of technology; beijing; 100022; china; 2.biochamical engineering college; beijing union university; beijing; 100023; china)
..............page:225-228,232
Influence of Target Power Density on Ga-Doped ZnO Thin Films Prepared by Middle-Frequency Alternative Magnetron Sputtering
zhao fanghong; zhuang daming~*; zhang gong and zha shan(department of mechanical engineering; tsinghua university; beijing; 100084; china)
..............page:222-224,237
Photochromic Properties of Single Ag(TCNQ) Micro/Nanostructure
cao guanying~(1; 3); fang fang~1; mo xiaoliang~1; ye chunnuan~1xing xiaoyan~1; xu huahua~2; sun dalin~(1*) and chen guorong~(1*)1.department of materials science; fudan university; shanghai; 200433; 2.department of chemistry; fudan university; shanghai; 200433; 3.department of mechanical engineering; dalian institute of light industry; dalian; 116034; china
..............page:185-188
Field Emission Study of Three Different Ferroelectric Cathode Materials
chen zhongdao~*; zhang shuren; guo shuguang and cai xuemei(university of electronic science and technology of china; chengdu 610054; china)
..............page:177-180
Comparison of Anti-pressure Capacity for Two Different Structures of Magnetic Fluid Seals
he xinzhi; li decai~*; lan huiqing and xu haiping (school of mechanical; electronic and control engineering ; beijing jiaotong university; beijing; 100044; china)
..............page:238-240
Structural and Optical Properties of a-Si_(1-x)C_x∶H Thin Films Prepared by RF-PECVD
zhang yiying; du piyi~*; han gaorong; weng wenjian and wang jianxun(state key laboratory of silicon materials; department of materials science and engineering; zhejiang university; hangzhou; 310027; china)
..............page:192-195,203
Prediction of Field Enhancement Factor and Onset Voltages of Single Carbon Nanotubes by Wavelet Neural Networks
bao wenxing; zhu changchun~* and cui wanzhao(school of electronics and information engineering; xi an jiaotong university; xi an; 710049; china)
..............page:168-171,188
Mechanisms and Optimization of Diamond Film Growth by Hot-Filament Chemical Vapor Deposition
qi xuegui~(1; 2*); chen zeshao~2; xu hong~1; wang xuesheng~1; hou feng~1 and tan xiaoyong~11.school of mechanical engineering; east china university of science and technology; shanghai; 200237; china; 2.school of engineering science; university of science and technology of china; hefei; 230027; china
..............page:159-163
Preparation of Mo-W Alloy by Chemical Vapor Deposition
ma jie~*; bi anyuan; wang congzeng and zhou meiling(the key laboratory of advanced functional materials; ministry of education; beijing university of technology; beijing; 100022; china)
..............page:229-232
Synthesis of Carbon Nanotubes Using Dielectric Barrier Discharge Plasma Enhanced Chemical Vapor Deposition
li fei~(1; 2); li sheqiang~2; jiang nan~(2*); shi xiaoguang~1 and feng kecheng~11.changchun university of science and technology; changchun; 130022; china; 2.institute of physics; chinese academy of sciences; beijing; 100080; china
..............page:200-203
Characterization of ZnO Thin Films Prepared on SiO_2/Si Substrates
cao liangliang; ye zhizhen~*; zhang yang; zhu liping; zhang yinzhu; xu weizhong and zhao binghui(state key laboratory of silicon materials; zhejiang university; hangzhou; 310027; china)
..............page:164-167
Rectifying Effect in Contact Mode of STM
qiu weimin; yan xuejian~*; li xu; shen miao; zeng zhigang; zhang li and hua zhongyi(department of materials science; fudan university; shanghai; 200433; china)
..............page:189-191,199