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Vacuum Science and Technology
0253-9748
2005 Issue 2
Diagnostic of Microwave ECR Unbalanced Magnetron Sputtering Plasma by Langmuir Probe
zhang zhiguo; chen xiaomeng; liu tianwei; xu jun; deng xinlu and dong chuang* (state key laboratory of materials modification; dalian university of technology; dalian 116024; china)
..............page:110-114
Properties of Diamond Like Carbon Films Prepared by Unbalanced Magnetron Sputtering
xu junqi*; hang lingxia and hui yingxue (school of optoelectronical engineering; xi an institute of technology; xi an; 710032; china)
..............page:134-137,141
Evaluation and Simulation of Leakage of Multi-Level Series Seal
liu yang*; yu jianping; sun chong; cui zhanpeng and liu zhanqing (beijing special engineering design institute; beijing 100028; china)
..............page:127-133
Microstructures and Ferroelectric Properties of Ba_(0.6)Sr_(0.4)TiO_3 Thin Films
chen hongwei*; yang chuanren; fu chunlin; zhao li and gao zhiqiang (institute of microelectronics & solid state electronics; university of electronic science & technology of china; chengdu; 610054; china)
..............page:96-99
Influence of Properties of Microwave Electron Cyclotron Resonance Plasma on Diamond-Like Carbon Film Deposition
chen xiaomeng; deng xinlu; zhang zhiguo; liu tianwei; ding wanyu and xu jun* (state key lab of material modification by laser; electron and ion beams dalian university of technology; dalian; 116024; china)
..............page:146-149
Preparation and Properties of Phosphorus Doped Diamond-like Carbon Films
wang jin ; sunny c.h.kwok; chen junying; yang ping; huang nan and p.k.chu ( key laboratory of advanced technologies of materials of ministry of education; school of materials and engineering of southwest jiaotong university; chengdu 610031; china; department of physics and materials science; city university of hong kong; tat chee avenue; kouwloon; hong kong; china)
..............page:123-126
3-D Numerical Reconstruction of Low Energy Electron High Resolution Holograms
ling li; sun yi; gu changxin* and shan liying (department of materials science; fudan university; shanghai; 200433; china)
..............page:100-104
Inhomogeneous Plasmas Produced by Double Plasma Device
ma jinxiu*; li yangfang; li jingju; xiao delong; wang hai; wan shude; wen yizhi; xie jinlin; yu chuangxuan and cao jinxiang (department of modern physics; university of science and technology of china; hefei; 230026; china)
..............page:138-141
Microstructures and Thermal Stability of Poly[2-methoxy-5-(3'-methyl) butoxy]-p-Phenylene Vinylene Film Modified by N Ion Implantation
li baoming*; wu hongcai; liu xiaozeng; gao chao and sun jianping (institute of photoelectric technology and solar energy; school of electric and information engineering; xi an jiaotong university; xi an; 710049; china)
..............page:120-122,126
Influence of Auxiliary Pulse on Performance of Color Plasma Display Panels during Sustain-Period
zhang xiaoning and liu chunliang (institute of physical electronics and devices; xi an jiaotong university; xi an; 710049; china)
..............page:88-92
Extremely High Vacuum Molecular Shield Facilities with Changeable Wing in Low-earth Orbit
da daoan; zhang hualin and yan shaoguang (lanzhou institute of physics; lanzhou; 730000; china)
..............page:79-82,92
Monte Carlo Simulation of Cu Thin Film Growth by Magnetron Sputtering
liu zuli*; zhang xuefeng; yao kailun and hung yunmi (department of physics; huazhong university of science and technology; wuhan 430074; china)
..............page:83-87,114
Influence of ZnTe Insertion Layer on CdS/CdTe Photovoltaic Device Performance
song huijin1; yan qiang~1; 2 ; zheng jiagui~1* ; feng lianghuan1; wu lili1; zhang jingquan1; cai wei1; cai yaping1; li wei1 and li bing1 1.institute of solar energy materials and devices; sichuan university; chengdu; 610064; china; 2.college of materials science and engineering; shanxi university of science & technology; xianyang; 712081; china
..............page:105-109
Preparation and Characterization of p-type Transparent Conductive Tin-gallium Oxide Films
ji zhenguo*; chen chen; wang chao; zhou qiang and zhao lina (state key lab for silicon materials; zhejiang university; hangzhou; 310027; china)
..............page:93-95,99
Effect of Ar Pressure on Stress and Microstructure of Al Films Grown on Si Wafers
song xueping; rao shuling; fang wei and sun zhaoqi* (school of physics and material science; anhui university; hefei; 230039; china)
..............page:150-153,158
Growth of High Mobility Transparent Conducting In_2O_3:Mo Thin Film
li xifeng; miao weina; zhang qun*; huang li; zhang zhuangjian and hua zhongyi (department of materials science; fudan university; shanghai; 200433; china)
..............page:142-145,149
Temporal Evolution in an Ion-matrix Sheath During Plasma Immersion Ion Implantation
huang yongxian1; tian xiubo~1* ; yang shiqin1; huang zhijun1; ricky fu2 and paul k.chu2 (1.advanced welding production & technology national key laboratory; harbin institute of technology; harbin 150001; china; 2.department of physics and materials science; city university of hong kong; kowloon; china)
..............page:115-119
Design of Cryopump Installed in Drift Tube of Neutral Beam Injector
chen changqi~1* ; ge rui1; wang jun1; nie jinliang1; oyang zhengrong2 and hu chundong2 1.school of mechanical and automobile engineering; hefei university of technology; hefei; 230009; china; 2.institute of plasma physics; chinese academic of science; hefei; 230031; china
..............page:154-158