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Vacuum Science and Technology
0253-9748
2004 Issue 1
Fabrication of Multi-Anode Micro-channel Arrays Detector and lts Applications
li huirui *1 ; zhao wenjin 1; shentu jun 1 and feng bing 2 1.no.55 institute of china electronics technology group corporation; nanjing; 210016; china; 2.institute of northwest nuclear research; xi an; 710014; china
..............page:32-37
Influence of Substrate Bias on Growth of Amorphous Fluorinated Carbon Films
yao zhiqiang; yang ping; sun hong; wang jin and huang nan * (school of materials science and engineering; institute of biomaterials and surface engineering; southwest jiaotong university; sichuan; chengdu; 610031; china)
..............page:48-51
Intelligent Monitoring and Diagnosis of RH-KTB Vacuum System Based on Object-Oriented Fault Tree Models
wang qing *1 ; ba dechun 1; jin yufei 2 and wang xiaodong 1 1.school of mechanical engineering & automation; northeastern university; shenyang; 110004; china; 2.steel making mill; shanghai; 210900; china
..............page:56-59
Mechanical and Tribological Properties of Diamond-like Carbon Films on Stainless Steel Grown by RF Plasma Enhanced Chemical Vapor Deposition
lin zeng 1; ba dechun 1* ; wang zhi 1 and wen lishi 2 1.vacuum and fluid engineering research center; northeastern university; shenyang; 110004; china; 2 institute of metal research; the chinese academy of science; shenyang; 110016; china
..............page:82-85
Homoepitaxial Growth of SrTiO_3 Thin Film in UHV
li jinlong; zhang ying *; deng xinwu; liu xingzhao; tao bowan and li yanrong (school of microelectronics and solid state electronics; univercity of electronics science and technology; chengdu; 610054; china)
..............page:68-71
Computer Simulation and Numerical Reconstruction of Low Energy Electron Projection Holography
sun yi; ling li and gu changxin * (department of materials science; fudan university; shanghai; 200433; china)
..............page:27-31
Study on Ion Beam Density of Magnetron Sputtering
xu junqi *; hang lingxia and cai changlong (department of optic electricity engineering; xi an institute of technology; xi an; 710032; china)
..............page:79-81
Simulation of 3D Transient Flow Characteristic of Disk-Shaped Turbo-Molecular Pump
ba dechun *1 ; liu bo 1; 2 ; wang xiaodong 1; yang naiheng 1 and yu zhiming 3 1.mechanical engineering institute of northeastern university; shenyang; 110004; china; 2.engineering institute of shenyang institute university; liaoyang; 111003; china; 3.security engineering department of shenyang institute of aeronautical engineering; shenyang; 110034; china
..............page:16-20
Surface Alloying of Nickel on Copper Substrate by Double Glow Discharge
yuan qinglong; su yongan and xu zhong * (surface engineering research institute; taiyuan university of technology; taiyuan; 030024; china)
..............page:45-47
Computerized Vacuum Control and Monitoring System of Neutral Beam Injection Device in HT-7 Tokamak
zhu wu 1* ; wang li 1 and hu chundong 2 1.school of mechanical and automobile engineering; hefei university of technology; hefei; anhui; 230009; china; 2.institute of plasma physics.chinese academy of sciences; hefei; anhui; 230031; china
..............page:64-67
Theoretical Study of Adsorption Sites of ZnO on α-Al_2O_3 (0001) Surface
yang chun *1; 2 ; li yanrong 1; tao baiwan 1; liu xingzhao 1; zhang ying 1 and liu yonghua 3 1.institute of microelectronics and solid state electronics; uestc; chengdu sichuan; 610054; china; 2.institute of mathematics and software science; sichuan normal university; chengdu sichuan; 610068; china; 3.institute of chemical materials; china academy of engineering physics; mianyang sichuan; 621000; china
..............page:10-15
Newly Developed Electron Cyclotron Resonance Plasma Chemical Vapor Deposition System
yin shengyi 1; chen guanghua 1* ; su yinong 2 and zhang yongqing 2 1.department of materials science and engineering; beijing university of technology; beiging; 100022; china; 2.center for microwave device and technology; the institute of electronics; chinese academy of sciences; beijing; 100080; china
..............page:38-41
Preparation and Characterization of ZnO Nanorods
zhang xudong 1; xing yingjie 1; xi zhonghe 1* ; xue zengquan 1; zhang qiaing 2 and yu dapeng 3 1 department of electronics; peking university; beijing; 100871; china; 2 beijing union university; beijing; 100101; china; 3 school of physics; peking university; beijing; 100871; china
..............page:21-23
Langmuir Probe Diagnosis of an Electron Cyclotron Resonance Plasma Source
wu zhenyu *; wang jiayou and yang yintang (institute of microelectronics; xidian university; xi an; 710071; china)
..............page:76-78
Study of Newly Developed Color AC Plasma Display Panel
fan yufeng *; liu chunliang; sun jian and shen sikuan (key laboratory for physical electronic and devices of the ministry of education; china; xi an jiaotong university; xi an; 710049; china)
..............page:6-9
Study of Aluminate Used in Ba-W Cathode Impregnation
wang xiaoxia *; liao xianheng; luo jirun and zhao qinglan (institute of electronics; chinese academy of sciences; beijing; 100080; china)
..............page:72-75
Growth of Carbon Nanotube by Chemical Vapor Deposition with Fe/MgO as Catalyst
wang qicai 1* ; li mengke 2; li hulin 3 and huang liangfu 1 1.lanzhou institute of physics; chinses academy of space technology; lanzhou; 730000; china; 2.college of physics and electronic engineering; northwest normal university; lanzhou; 730070; china; 3.department of chemistry; lanzhou university; lanzhou; 730000; china
..............page:60-63,75
Fabrication of Carbon Nanotube Field Emission Cathode by Screen Printing
zhou xuedong 1; lei wei 1* ; zhang yuning 1; wang qilong 1; li juntao 1 and li jiahui 2 (1.department of electronic engineering; southeast university; nanjing; 210096; china; 2.school of information and control engineering; southwest university of science and technology; mianyang; 621002; china)
..............page:52-55
Funnel Shaped Pores of Low Noise Micro-Channel Plate
fu wenhong and chang benkang * (school of electronic engineering and optoelectronic technology; nust; nanjing; 210094; china)
..............page:24-26
Antenna Design of a New Inductively Coupled Plasma Source
wu zhenyu *; yang yintang and wang jiayou (institute of microelectronics; xidian university; xi an; 710071; china)
..............page:42-44